About Us

The core product offer includes new and remanufactured single wafer, batch and cluster tools for research and production. The recently introduced Polygon cluster offers multiple configurations with sputtering, pre-etch, anneal and RTP chambers in a reduced footprint. The Eclipse remanufactured product family provide high throughput and broad process range with the certainty of a large installed base. Batch tools combine high throughput with the possibility to run almost any substrate type in fully automated or semi-manual horizontal or vertical configurations. Evaporators offer a large choice of sources, chamber sizes, substrate number and process options for the most demanding applications in R&D and production. R&D oriented sputtering tools come in independent or confocal configurations and a wide choice of platform types by chamber and target numbers with or without load-lock. Large area coaters are built around the customer specifications and requirements for various application segments. In-line tools are successful scalable, low CoO, versatile, customized tools.

TFE can also provide refurbished and fully remanufactured platforms from large OEM’s for various applications like etch, PVD, RTP and Epitaxy. High purity targets for sputtering and evaporation and high quality quartzes complete our product offer.

TFE is headquartered in Binasco (Milano, Italy) where have R&D, manufacturing, testing, demo clean room and warehouse. An international organization in all European Countries and China with an agent network in North America and the remaining Asian countries ensures local, timely and professional support to our customers.