TFE - Thin Film Equipment

PSK Inc.

Based in Korea, in the heart of one of the world most important semiconductor fab areas, PSK is the worldwide leading supplier of strippers with a 37% market share in 2016 (source Gartner) and over 1150 tools installed. The PSK product portfolio includes single chamber and cluster tools for wafer sizes ranging from 4” to 300mm as well as tools for photomasks.

PSK devote special focus on quality control and continuous development of new products, applications and processes. In spite of its dominant position PSK continue to strive to be creative and think out of the box. With a wealth of data converted into knowledge, PSK have been able to develop innovative technologies in the recent years.

Utilizing the accumulated data and technologies as well as the help of its talented and deeply trained personnel, PSK works very hard to convert its roadmap, focused on the development of greater innovations in technology, into reality.

DAS Series

DAS series is the latest generation 200mm Ashing and Etching System with increased productivity and it design with the smallest footprint for 200mm System. The system provided high quality process performance, consistency and high precision compared to previous model.

A multi-source Platform is designed for installing Microwave, FCIP or Advanced ICP, depending on the customer's application purpose. RF Bias can be used for both Ashing system (Descum) and Etching application. In addition to DAS series innovative process advancements, Major improvement in system reliability have been achieved through easier HW maintenance and field Proven customized SW. DAS series can be flexible wafer size transfer and process.

Ecolite Series

Ecolite3000, successor of the Tera Series, is a simple and economic Low Temperature Ashing System designed with a Low Damage Remote Microwave Plasma Source & Bias Power.

The system achieves high ashing rates(2micro m/min) under low temperature conditions and high performance Descum processes for flip-chip bumping applications. High productivity, process recipe flexibility and small design footprints lead to Low Cost Ownership for customers.