Advanced Modular System

Founded in 2000 and based in Goleta (California, USA), AMS was created with only one goal: becoming the top supplier of equipment for BAW/SAW/FBAR/piezo-MEMS applications. With over 3 millions of wafers manufactured with AMS tools, a large installed base and the new Generation 5 product line, launched in 2015 AMS have achieved its initial goal. A comprehensive continuous improvement plan still in place grant AMS customers to be on the top for these applications

The AMS product offer includes single chamber and cluster tools for BAW/SAW/FBAR/piezo-MEMS applications. The combination of a state-of-the-art Magnetron array with an advanced trimming technique allows the deposition of thin films of Piezoelectric Aluminum Nitride, AlScN and Electrodes Materials likeMo, W, Ti, TiN, Ru, Pt, Cu, Al, etc with outstanding properties. Excellent uniformity, stress, crystallinity, surface roughness control and frequency adjustments are only some of the main advantages of AMSystems tools.