Remanufacturing MRC Eclipse Systems
TFE srl has a comprehensive refurbishing program designed to extend the useful life of MRC Eclipse Sputtering Systems. This program extends from refurbishing and updating the equipment sub-systems for existing owners, by acquiring used systems and completely re-manufacturing them for new customer's applications. Typically, the tool is dismantled and completely rebuilt using newly modernized, advanced components. Every TFE's remanufactured tool is guaranteed to meet or exceed OEM specifications and is backed with an extensive warranty and Field Service capability.
The Eclipse is an advanced multi-metal sputtering production tool, capable of depositing high quality VLSI film stacks. The system is configured with sputter etch, and three independent UHV sputter chambers to support both metal and reactive sputtering modes. The cathodes are high performance rotating magnet DC magnetrons capable of producing very uniform films. The system has an ergonomic wafer handler with field proven robotics. A production work horse, the system delivers a throughput performance up to 54 wafers per hour, and lower cost of ownership than any similar tool. TFE specializes in sourcing, remanufacturing, and the re-supply of these systems.
ECLIPSE REFURBISHMENT: Eclipse STAR, Eclipse MARK II, Eclipse MARK IV
- All cryo pumps removed and refurbished by Helix Technology (CTI)
- Gate valves cleaned and re-registered as required
- Throttle valves cleaned and calibrated
- Ion gauges and seal o-rings replaced (New)
- Seal Rings replaced (As required)
- Rough valves refurbished
- Cryo compressors absorbers changed (New)
- Replace burnt CRT monitors (As required)
- Install Quick cool if not on system (As required)
- Clean/replace water flow meters and indicators (As required)
- Clean/replace water lines (As required)
- Replace chaffed or damaged pneumatic lines (As required)
- Add water drain lines to all cathodes (As required)
- Replace missing or damaged panels
- System configuration to new owners requirements:
- Type of backplane
- Type of wafer holders
- Cathode type
- Bias options
- Hard/Soft Etch
- Reactive gas options
- CTI onboard upgrade available
- Water pump upgrade on plenum available
- Full system calibration and alignment
- All functions fully tested
- Vacuum performance verified to MRC's original specification
- Replace remote monitor wood table with SS
For any further information about this product, for any technical information, custom upgrades or to request a quotation please Contact Us.