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ELS System Technology

ELS System Technology


ELS SEMI Enhanced Lithography Solutions Co


ELS SEMI (Enhanced Lithography Solutions Co., Ltd) is a total solution Korean provider of photo equipment. ELS supply tools in “as is”, “as where” condition as well as fully refurbished tools. 
ELS also provide process and service support for used photo exposure equipment. TFE represent ELS for the European market



ELS are mainly specialized in Nikon stepper, Canon stepper, Canon aligner, Karlsuss aligner, TEL, DNS, TOK, SVG track and photo process foundry.


About services, ELS personnel can perform all of the following activities:

  • Locate Equipment
  • Source inspection of equipment and perform pre-move testing
  • Purchase and broker equipment packages
  • De-install, environmentally crate and ship equipment
  • Refurbish, Modify, and Upgrade equipment
  • Install, Calibrate, and Test equipment
  • Train End Users

TFE - Thin Film Equipment S.r.l.
Viale delle Scienze, 23
20082 Binasco (MI) - Italy.
P.Iva 03189010964
Tel: +39 02 90092460

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Thin Film Equipment @ All rights reserved.

  • Home
    • About us
    • News & Events
    • Our Capabilities
  • Products
    • NEW Sputtering System Model BH3F and BH4F
    • Remanufacturing MRC Batch Systems
    • Remanufacturing MRC Eclipse Systems
    • Polygon Cluster Sputtering System
    • Second hand semiconductor equipments
  • Principals
    • Grikin Advanced Materials Co., Ltd
    • Elettrorava SpA
    • Kenosistec srl
    • Solutions On Silicon BV
    • ELS System Technology
    • GigaLane Deep Reactive Ion Etchers
    • High Purity Quartzes
    • Advanced Modular System
  • Spare and Support
  • Private Area